JPH0726623Y2 - 真空ゲート弁 - Google Patents

真空ゲート弁

Info

Publication number
JPH0726623Y2
JPH0726623Y2 JP1990090867U JP9086790U JPH0726623Y2 JP H0726623 Y2 JPH0726623 Y2 JP H0726623Y2 JP 1990090867 U JP1990090867 U JP 1990090867U JP 9086790 U JP9086790 U JP 9086790U JP H0726623 Y2 JPH0726623 Y2 JP H0726623Y2
Authority
JP
Japan
Prior art keywords
bellows
stem shaft
shaft
flange
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990090867U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448481U (en]
Inventor
和敏 船場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Steel Works Ltd
Original Assignee
Japan Steel Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Steel Works Ltd filed Critical Japan Steel Works Ltd
Priority to JP1990090867U priority Critical patent/JPH0726623Y2/ja
Publication of JPH0448481U publication Critical patent/JPH0448481U/ja
Application granted granted Critical
Publication of JPH0726623Y2 publication Critical patent/JPH0726623Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP1990090867U 1990-08-29 1990-08-29 真空ゲート弁 Expired - Lifetime JPH0726623Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990090867U JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990090867U JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Publications (2)

Publication Number Publication Date
JPH0448481U JPH0448481U (en]) 1992-04-24
JPH0726623Y2 true JPH0726623Y2 (ja) 1995-06-14

Family

ID=31825986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990090867U Expired - Lifetime JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Country Status (1)

Country Link
JP (1) JPH0726623Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522195B2 (ja) * 2003-09-01 2010-08-11 株式会社アルバック 半導体製造装置用の切換え弁

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177371U (en]) * 1987-05-08 1988-11-17
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁

Also Published As

Publication number Publication date
JPH0448481U (en]) 1992-04-24

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